SUSTAINABLE NANOFABRICATION AND CHARACTERISATION FOR SEMICONDUCTOR MANUFACTURING - 2027/8

Module Overview

This module introduces students to advanced experimental techniques and analytical skills crucial for modern semiconductor manufacturing, with a strong emphasis on sustainable processes, materials and lifecycle thinking. Students will learn how to characterise nano¿ and micro¿scale semiconductor device structures, thin films and functional materials, apply design of experiments and statistical methods to minimise waste, energy consumption and redundant testing, and assess the environmental and quality impacts of fabrication methods. Discussions will include emerging green fabrication approaches, material circularity, resource efficiency, and clean manufacturing in the semiconductor sector.

Module provider

Computer Science and Electronic Eng

Module Leader

SHKUNOV Maxim (CS & EE)

Number of Credits: 15

ECTS Credits: 7.5

Framework: FHEQ Level 7

Module cap (Maximum number of students): N/A

Module Availability

Semester 1

Prerequisites / Co-requisites

none

Module content

1. Design of Experiments (DoE) & Process Optimisation
¿ Principles of experimental design, factorial design, Taguchi method, ANOVA
¿ Application of DoE in semiconductor manufacturing lines for process yield, energy/water minimisation
¿ Case studies on yield improvement, waste reduction, process robustness
¿ Systems engineering, prioritisation and Risk Management
2. Optical Microscopy and Spectroscopy
¿ Optical, 3D optical microscopies in process inspection
¿ UV¿Vis¿NIR, FTIR, luminescence, Raman spectroscopy applied to thin films / device structures
¿ Use of non¿destructive characterisation to reduce waste and improve throughput
3. Nanostructure Growth, Deposition & Sustainable Materials
¿ Chemical Vapour Deposition (CVD), atomic layer deposition (ALD), solution processing of nanostructures
¿ Materials selection for sustainability: low¿toxicity materials, recyclability, low¿energy processes. Material selection and decision matrices.
¿ Models for growth of nanostructures and thin films in semiconductor fabrication
4. Surface Characterisation and Electrical Properties
¿ Atomic Force Microscopy (AFM), X¿ray photoelectron spectroscopy (XPS), electrical measurements at the nanoscale
¿ Characterisation of device performance and reliability; linking material/process metrics to device yield, 6¿¿manufacturing.
¿ Environmental and reliability testing: thermal cycling, humidity, defect propagation
5. Ion Beams, Lithography & Clean Manufacturing
¿ Ion implantation, ion beam analysis, thin film characterisation
¿ Lithography (optical, electron¿beam, nanoimprint) and patterning techniques used in semiconductor manufacturing
¿ Cleanroom procedures, resource (chemicals, water, energy) minimisation, waste handling, and sustainability practices
6. Micro¿ and Nano¿Electromechanical Systems (MEMS/NEMS) & Emerging Devices
¿ Fundamentals of MEMS/NEMS design and processing, applications in sensors, actuators and IoT
¿ Drivers for next¿gen devices: energy harvesting, low¿power electronics, sustainability in device lifecycle
¿ Life¿cycle assessment (LCA) of MEMS/NEMS, circular economy in device manufacture
7. Sustainability and Circular Economy in Semiconductor Manufacturing (New addition)
¿ Introduction to the semiconductor supply chain, semiconductor materials lifecycle, e-waste issues
¿ Strategies for energy-efficient fabs, water recycling, material reuse, clean manufacturing best practices
¿ LEAF (Laboratory Assessment Framework)
¿ Case studies: green fabrications, zero-waste process flows, sustainable materials substitution

Assessment pattern

Alternative Assessment

N/A

Assessment Strategy

The assessment strategy for this module is designed to provide students with the opportunity to demonstrate the following:

· The practical analysis of data, including specifically error estimation and derivation.

· Application of design of experiments concepts to planning research strategies.

· The understanding of the wider scope of a specific piece of research, through literature review

· The graphical representation of results and analysis, including the understanding the role of figure captions.

· The ability to understand the fundamental theory behind major experimental techniques used in nanotechnology and fabrication and apply it to case studies and examples.

· A general understanding of the achievements and challenges facing the next generation of nanoscale devices.

Thus, the summative assessment for this module consists of the following:

• Coursework   (Learning outcomes 2 and 3)
• Exam      (Learning outcome 1)

Any deadline given here is indicative. For confirmation of exact dates and times, please check the Departmental assessment calendar issued to you.

Formative assessment and feedback

For the module, students will receive formative assessment/feedback in the following ways.

· During lectures, by question and answer sessions

· During tutorials/tutorial classes

· By means of unassessed tutorial problem sheets (with answers/model solutions)

Module aims

• Introduce students to common analytical experimental techniques used in semiconductors and nanotechnology, such as: 1) optical microscopy (eg. confocal) and spectroscopies (eg. Raman); 2) scanning probe microscopy (Atomic Force Microscopy and its variants); 3) ion, X-ray and electron beam spectroscopies (eg. Rutherford Backscattering, Energy-dispersive X-ray); 4) electrical measurements.
• Provide practical experience in analysing data and measurement errors. Provide practical experience in Design of Experiments approaches.
• Provide some of the soft skills used in communicating research results, such as literature searching, use of referencing database, producing journal-quality figures and presenting results.
• Introduction to semiconductor electronics and electro-mechanical fabrication techniques (lithography, printing).
• Introduction to semiconductor nanomaterials fabrication techniques (eg. growth of graphene, nanotubes and nanowires, deposition of thin films)
• Introduction to the semiconductor supply chain, semiconductor materials lifecycle, e-waste issues
• Strategies for energy-efficient fabrications, water recycling, material re-use, clean manufacturing best practices.

Learning outcomes

Methods of Teaching / Learning

The learning and teaching strategy is designed to achieve the following aims.
The course covers some of the fundamentals behind nanotechnology and moves on to discuss their practical implementation in nanoscience and quantum engineering, nanomaterials and nanotechnology, before discussing future trends and applications. Coupled with this, the course teaches some of the basics of scientific communication, from literature review to the design and planning of publication-quality images and figures, to the presentation of data. It also strengthens the some of the basic mathematical skills necessary for data analysis and introduces design of experiment approaches.

Learning and teaching methods include the following.
¿ Online taught material and class discussions
¿ Tutorials and formative feedback sessions
¿ Dedicated revision sessions

Indicated Lecture Hours (which may also include seminars, tutorials, workshops and other contact time) are approximate and may include in-class tests where one or more of these are an assessment on the module. In-class tests are scheduled/organised separately to taught content and will be published on to student personal timetables, where they apply to taken modules, as soon as they are finalised by central administration. This will usually be after the initial publication of the teaching timetable for the relevant semester.

Reading list

https://readinglists.surrey.ac.uk
Upon accessing the reading list, please search for the module using the module code: EEEM088

Other information

The module provides the students the opportunity to demonstrate their mastery of advanced calculations, which will aid their employability and digital competence. Critical thinking and exercising engineering judgment will be developed via carefully chosen practical examples, working with missing data and critically assessing published peer-reviewed articles (R&R) The student¿s digital capabilities will be enhanced via the student¿s use of advanced experimental software to extract and interpret results from experimental data.

Please note that the information detailed within this record is accurate at the time of publishing and may be subject to change. This record contains information for the most up to date version of the programme / module for the 2027/8 academic year.